This document applies to the interpretation of data relating to the measurement of the surface form deviations of optical elements or the wavefront deformations of optical systems. Often the measurement data are generated by using interferometric techniques, but other measurement techniques also generate measurement data to describe the surface form deviations or wavefront deformations.

This document gives definitions of the optical functions and values specified in the preparation of drawings for optical elements and systems, made in accordance with ISO 10110-5 and/or ISO 10110-14 for which the corresponding nomenclature, functions, and values are listed in ISO 10110-5:2026, Annex B.